JPS4981927U - - Google Patents
Info
- Publication number
- JPS4981927U JPS4981927U JP12961472U JP12961472U JPS4981927U JP S4981927 U JPS4981927 U JP S4981927U JP 12961472 U JP12961472 U JP 12961472U JP 12961472 U JP12961472 U JP 12961472U JP S4981927 U JPS4981927 U JP S4981927U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12961472U JPS5255470Y2 (en]) | 1972-11-10 | 1972-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12961472U JPS5255470Y2 (en]) | 1972-11-10 | 1972-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4981927U true JPS4981927U (en]) | 1974-07-16 |
| JPS5255470Y2 JPS5255470Y2 (en]) | 1977-12-15 |
Family
ID=28387624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12961472U Expired JPS5255470Y2 (en]) | 1972-11-10 | 1972-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5255470Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102383108B1 (ko) | 2018-05-18 | 2022-04-04 | 삼성전자주식회사 | 웨이퍼 처리 장치 및 메모리 소자의 제조 방법 |
-
1972
- 1972-11-10 JP JP12961472U patent/JPS5255470Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5255470Y2 (en]) | 1977-12-15 |